STI succeeds in localizing the manufacturing of focus ring through synthetic quartz for semiconductors!


Issue date: 2022-07-28 16:00

- Using optical fiber preform manufacturing technology, localization of focus ring ingot production, and equipment
- Successful localization of synthetic quartz from small, medium, and long-term manufacturing equipment to optical preform
- Development of Synthetic Quartz Manufacturing Equipment...Goal to lead the domestic quartz market, which is barren of optical preform

<SA Gong-jun (left) of STI and Yoo Jae-myung, a senior at the R&D Institute of Optic, are presenting synthetic quartz>

Although the new government is making a drive in the semiconductor industry, "Synthetic Quartz,"

which is the core of the semiconductor manufacturing process, has relied on imports in full. It is no exaggeration to say that major companies such as Japan,

the United States, and Germany have monopolized it. In particular, synthetic quartz was a monopoly item, so tyrannical sales were common.

It was common for buyers to not secure supplies even after paying advance payments.

Meanwhile, a Korean company succeeded in localizing synthetic quartz preforms for semiconductor focus rings

for the first time in Korea based on its unique high-purity optical fiber preform manufacturing technology.

STI succeeded in localizing and mass-producing synthetic quartz glass materials that Japan has monopolized in 2020 through cooperation with the Korea Ceramic Technology Institute
Last year, it produced synthetic quartz for optical and welding rods, and this time, it developed synthetic quartz materials for semiconductor focus rings.

Synthetic quartz, which is mainly used in semiconductor etching process, has been imported 100 percent from Japan, the U.S., and Germany.

Synthetic quartz glass is required for next-generation micro-process ultraviolet (EUV) exposure.
High-level chemical technology and large-scale facilities are essential because high purity and high precision are required.

<Synthetic quartz transmittance data localized by STI>

Synthetic quartz is a material that has been developed to suit semiconductor production processes.

It is useful for semiconductor etching processes that are integrated below 17nm due to excellent wear resistance and light transmittance and lack of microbubbles.

Experts estimate that the global natural quartz market is currently around KRW 5 trillion, and synthetic quartz will replace 30% of it in the future.

With the expansion of IT platforms and 5G markets around the world and the revitalization of electric vehicles and autonomous vehicle markets,

semiconductor manufacturers' investments are increasing significantly to catch up with demand.

As the average annual growth rate (GAGR) of the semiconductor parts market reaches 27.2%, the synthetic quartz market is also expected to grow stably.

STI has precursor refining technologies such as SiCl4 and OMCTS, high-purity silane, ingot growth technologies through carrier gas control

such as high-purity hydrogen (H2), and process control technologies that remove OH using high-temperature gas.

Focus ring composite quartz for semiconductors developed by STI is manufactured by VAD method.

Based on the localization of synthetic quartz materials for semiconductor focus rings, it is expected that the replacement effect of materials imports will be great.

In particular, it is expected that it will be possible to respond quickly to the synthetic quartz market,

which is growing stably as demand for semiconductors increases rapidly due to the revitalization of the electric and autonomous vehicle markets.

Last year, the global market for quartz parts for semiconductors was 2 trillion won, and the domestic market for synthetic quartz is expected to be about 150 billion won by 2025.

reference: Etnews